硅片,抛光硅片,硅片价格,晶圆,碳化硅,砷化镓,晶片蓝宝石,硅衬底,SOI硅片,N型硅片,P型硅片,硅片厂家,氧化硅片,薄硅片,厚硅片,区熔硅片,锗晶片,外延硅片,直拉硅片,单晶硅片,铌酸锂,LN,钽酸锂,LT,silicon wafers, silicon, silicon slices, prime silicon wafers, test silicon wafers, particle monitor silicon wafers, furnace silicon wafers, mechanical silicon wafers, silicon wafer processing, silicon wafer servicessilicon wafers, silicon, silicon slices, prime silicon wafers, test silicon wafers, particle monitor silicon wafers, furnace silicon wafers, mechanical silicon wafers, silicon wafer processing, silicon wafer servicessilicon wafers, silicon, silicon slices, prime silicon wafers, test silicon wafers, particle monitor silicon wafers, furnace silicon wafers, mechanical silicon wafers, silicon wafer processing, silicon wafer servicessilicon wafers, silicon, silicon slices, prime silicon wafers, test silicon wafers, particle monitor silicon wafers, furnace silicon wafers, mechanical silicon wafers, silicon wafer processing, silicon wafer services, CRYSTALS, BaB2O4, BaF2, CaF2, LiF, MgF2, KBr, KCl, NaCl, CsI, CaCO3, KRS-5, KRS-6, KDP, KTP, PbMoO4, LiIO3, LiNbO3, Quartz, Sapphire, Scintillators, TeO2, TiO2, Rutile, ZnSe, Thermal Oxide, PSG/BPSG, Plasma Nitride, Polysilicon, Photolithography, Epitaxy, Metals, Photo Resist Coating, LPCVD Silicon Nitride, Plasma Oxide, TEOS Oxide, LTO,wafer fabrication,sic wafer,gaas wafer,dummy wafer,soi wafer,glass wafer,semiconductor wafer,silicon oxide,si wafer,quartz wafer,silicon,silicon nitride,epi wafer,silicon on insulator,polished wafer,monocrystalline silicon,semiconductor manufacturing,silicon wafer price,硅片,抛光硅片,硅片价格,晶圆,碳化硅晶片,砷化镓晶片,晶片蓝宝石,硅衬底,SOI硅片,N型硅片,P型硅片,硅片厂家,氧化硅片,薄硅片,厚硅片,区熔硅片,锗晶片,外延硅片,直拉硅片


Grade	Dimeter	Type/dopant	Orientaion	carborn 10*E-6	oxygen 10*E-6	lifetime /us	thickness	Resistivity	Flat	Surface/Roughness	Geometric parameter
FZ growth prime wafer	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	<=0.2	<=0.1	300 - 1*10E4	400um+/-20 400um+/- 20 400um+/-20	1 - 100000 Ohm-cm /Customization	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
100mm 125mm 150mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	<=0.2	<=0.1	300 - 1*10E4	525um+/-20 625um+/-20 625um+/-20	1 - 100000 Ohm-cm /Customization	32.5mm 42.5mm 57.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
200mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	<=0.2	<=0.1	300 - 1*10E4	725um+/-20	1 - 100000 Ohm-cm /Customization	nothch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
300mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	<=0.2	<=0.1	300 - 1*10E4	775um+/-20	1 - 100000 Ohm-cm /Customization	notch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
MCZ growth prime wafer	25.4mm 50.8mm 76.5mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	5 - 15	<=0.2	50 - 1*10E4	200um+/- 20 100um+/-20 customization	1 - 500 Ohm-cm /Customization	N/A 16mm 22.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
100mm 125mm 150mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	5 - 15	<=0.2	50 - 1*10E4	100um+/-20 200um+/- 20 customization	1 - 500 Ohm-cm /Customization	32.5mm 42.5mm 57.5mm	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
200mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	5 - 15	<=0.2	50 - 1*10E4	100um+/-20 200um+/- 20 customization	1 - 500 Ohm-cm /Customization	notch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um
300mm	P(Boron) N(Phos/As/Sb) intrinsic	<100> <111> or special orientation	5 - 15	<=0.2	50 - 1*10E4	100um+/-20 200um+/- 20 customization	1 - 500 Ohm-cm /Customization	notch/flat	polished/etched polished/polished	TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um

FZ growth prime wafer

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb) intrinsic

<100> <111> or special orientation

<=0.2

<=0.1

300 - 1*10E4

400um+/-20 400um+/- 20 400um+/-20

1 - 100000 Ohm-cm /Customization

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb) intrinsic

<100> <111> or special orientation

<=0.2

<=0.1

300 - 1*10E4

525um+/-20 625um+/-20 625um+/-20

1 - 100000 Ohm-cm /Customization

32.5mm 42.5mm 57.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um

200mm

P(Boron) N(Phos/As/Sb) intrinsic

<100> <111> or special orientation

<=0.2

<=0.1

300 - 1*10E4

725um+/-20

1 - 100000 Ohm-cm /Customization

nothch/flat

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um

300mm

P(Boron) N(Phos/As/Sb) intrinsic

<100> <111> or special orientation

<=0.2

<=0.1

300 - 1*10E4

775um+/-20

1 - 100000 Ohm-cm /Customization

notch/flat

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um

MCZ growth prime wafer

25.4mm 50.8mm 76.5mm

P(Boron) N(Phos/As/Sb) intrinsic

<100> <111> or special orientation

5 - 15

<=0.2

50 - 1*10E4

200um+/- 20 100um+/-20 customization

1 - 500 Ohm-cm /Customization

N/A 16mm 22.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um

100mm 125mm 150mm

P(Boron) N(Phos/As/Sb) intrinsic

<100> <111> or special orientation

5 - 15

<=0.2

50 - 1*10E4

100um+/-20 200um+/- 20 customization

1 - 500 Ohm-cm /Customization

32.5mm 42.5mm 57.5mm

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um

200mm

P(Boron) N(Phos/As/Sb) intrinsic

<100> <111> or special orientation

5 - 15

<=0.2

50 - 1*10E4

100um+/-20 200um+/- 20 customization

1 - 500 Ohm-cm /Customization

notch/flat

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um

300mm

P(Boron) N(Phos/As/Sb) intrinsic

<100> <111> or special orientation

5 - 15

<=0.2

50 - 1*10E4

100um+/-20 200um+/- 20 customization

1 - 500 Ohm-cm /Customization

notch/flat

polished/etched polished/polished

TTV < 5um TIR <3um STIR < 2um BOW < 20um Warp < 30um

FZ/MCZ Growth Siliocn Wafer

Contact info

Specification for FZ/MCZ Growth Siliocn Wafer